Method and apparatus for electroplating

Assignee

• Novellus Systems

Inventors

• Jonathan D. Reid (106 patents)
• Bryan L. Buckalew (75 patents)
• Zhian He (36 patents)
• Seyang Park (4 patents)
• Seshasayee Varadarajan (45 patents)
• Bryan Pennington (5 patents)
• Thomas A. Ponnuswamy (42 patents)
• Patrick Breling (1 patents)
• Glenn Ibarreta (2 patents)
• Steven T. Mayer (201 patents)

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