Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate table, lithographic apparatus and device manufacturing method

Substrate table, lithographic apparatus and device manufacturing method

US Patent 8274641 · Granted Sep 25, 2012

Estimated economic value: $165,675,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate support and substrate table2025
Substrate support and substrate table2025
Vibration isolator for supporting a payload2025
Substrate holder, lithographic apparatus, device manufacturing method, and metho2025
Substrate holder and method of manufacturing a substrate holder2025
Method of manufacturing a substrate support for a lithographic apparatus, substr2025
Substrate holder for use in a lithographic apparatus2025
Substrate support, lithographic apparatus, method for manipulating charge distri2025
Method for preparing a substrate and lithographic apparatus2025
Lithographic apparatus and method2025
Lithographic apparatus and a method of operating the apparatus2024
Lithographic apparatus and a method of operating the apparatus2024