Remote plasma processing of interface surfaces

Assignee

• Novellus Systems

Inventors

• George Andrew Antonelli (40 patents)
• Jennifer O'Loughlin (15 patents)
• Tony Xavier (2 patents)
• Mandyam Sriram (58 patents)
• Bart J. van Schravendijk (126 patents)
• Vishwanathan Rangarajan (12 patents)
• Seshasayee Varadarajan (45 patents)
• Bryan L. Buckalew (75 patents)

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