Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vacuum reaction chamber with x-lamp heater

Vacuum reaction chamber with x-lamp heater

US Patent 7777197 · Granted Aug 17, 2010

Estimated economic value: $3,871,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

AFE (active far edge) heater/bipolar ESC with simplified and optimized structure2025
Showerhead design to control stray deposition2025
Image forming apparatus having odor sensor for detecting odor diffusing from odo2025
Gas injection system and reactor system including same2025
Photosensitive drum unit2025
Susceptors with film deposition control features2025
High temperature coatings for a preclean and etch apparatus and related methods2025
Drum cartridge and developing cartridge capable of suppressing variation in posi2025
Fixture and method for determining position of a target in a reaction chamber2025
Semiconductor memory device2025
Developer cartridge provided with gear having engagement portions2025
Multilayer circuit board and electronic-component mount multilayer board2025