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Home › Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elements

Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elements

US Patent 7763870 · Granted Jul 27, 2010

Estimated economic value: $3,849,000 ⓘ

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