Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High resolution wafer inspection system

High resolution wafer inspection system

US Patent 7714999 · Granted May 11, 2010

Estimated economic value: $24,414,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Polarization optical system2025
Polarization optical system2025
System and method for performing active distance measurements2025
Method for inspecting a specimen and charged particle beam device2025
Examination of a hole formed in a semiconductor specimen2025
Multi-perspective wafer analysis2023
Die-to-multi-die wafer inspection2023
Determining a critical dimension variation of a pattern2023
Local shape deviation in a semiconductor specimen2023
System and method for performing active distance measurements2023
Method, system and computer program product for 3D-NAND CDSEM metrology2023
Evaluating an intermediate product related to a three-dimensional NAND memory un2022