Method, system and computer program product for 3D-NAND CDSEM metrology

Assignee

• Applied Materials

Inventors

• Roman Kris (19 patents)
• Roi Meir (1 patents)
• Sahar LEVIN (3 patents)
• Ishai Schwarzband (24 patents)
• Grigory Klebanov (5 patents)
• Shimon Levi (9 patents)
• Efrat Noifeld (2 patents)
• Hiroshi Miroku (1 patents)
• Taku Yoshizawa (1 patents)
• Kasturi Saha (1 patents)
• Sharon Duvdevani-Bar (4 patents)
• Vadim Vereschagin (8 patents)

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