Film forming method for depositing a plurality of high-k dielectric films

Assignee

• Tokyo Electron Limited

Inventors

• Yuichiro Morozumi (17 patents)
• Kazuhide Hasebe (97 patents)
• Shigeru Nakajima (101 patents)
• Haruhiko Furuya (9 patents)
• Dong-Kyun Choi (5 patents)
• Takahito Umehara (10 patents)
• Katsushige Harada (14 patents)
• Tomonori Fujiwara (15 patents)
• Hirotake Fujita (5 patents)

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