Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of inspecting a semiconductor wafer for defects

Method of inspecting a semiconductor wafer for defects

US Patent 6403385 · Granted Jun 11, 2002

Estimated economic value: $2,353,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for adaptively utilizing programmable logic devices2022
Low-H plasma treatment with N2 anneal for electronic memory devices2012
Interlayer dielectric for charge loss improvement2007
Semiconductor memory with data retention liner2007
Method for forming a hardmask employing multiple independently formed layers of 2007
PECVD silicon-rich oxide layer for reduced UV charging2006
Multi-chamber deposition of silicon oxynitride film for patterning2006
Undoped oxide liner/BPSG for improved data retention2006
Liner for semiconductor memories and manufacturing method therefor2004
Method for forming a hardmask employing multiple independently formed layers of 2004
Method for reducing pattern deformation and photoresist poisoning in semiconduct2004
CVD silicon carbide layer as a BARC and hard mask for gate patterning2003