Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403385 | Method of inspecting a semiconductor wafer for defects | Subramanian Venkatkrishnan, Tho Le La, Pei-Yuan Gao | 2002-06-11 |
| 6086464 | CMP platen plug | Robert M. Ulfig | 2000-07-11 |