Vacuum processing apparatus and oxidizing gas removal method

Assignee

• Tokyo Electron Limited

Inventors

• Hirokazu Ueda (37 patents)
• Yoji IIZUKA (9 patents)
• Mitsuaki Iwashita (57 patents)
• Antonio Luis Pacheco Rotondaro (56 patents)
• Dipak Aryal (3 patents)
• Takeo Nakano (4 patents)
• Ryuichi Asako (28 patents)
• Kenji Sekiguchi (37 patents)
• Koji Akiyama (86 patents)
• Naoki UMESHITA (4 patents)
• Takashi Hayakawa (58 patents)

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