Heat dissipating features for laser drilling process

Assignee

• TSMC

Inventors

• Chien-Hung Chen (300 patents)
• Cheng-Pu Chiu (20 patents)
• Chien-Chen Li (20 patents)
• Chien-Li Kuo (114 patents)
• Ting-Ting Kuo (25 patents)
• Li-Hsien Huang (108 patents)
• Yao-Chun Chuang (69 patents)
• Jun He (99 patents)

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