Interdigitated device stack

Assignee

• Tokyo Electron Limited

Inventors

• Lars Liebmann (214 patents)
• Jeffrey Smith (107 patents)
• Daniel Chanemougame (102 patents)
• Paul Gutwin (24 patents)
• Brian Tracy Cline (33 patents)
• Xiaoqing Xu (22 patents)
• David Victor Pietromonaco (31 patents)

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