Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus

Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus

US Patent 11774862 · Granted Oct 3, 2023

Estimated economic value: $33,384,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of controlling a patterning process, device manufacturing method2025
Method and apparatus to determine a patterning process parameter2025
Method for controlling a semiconductor manufacturing process2025
Computational metrology2025
Method and apparatus to determine a patterning process parameter using a unit ce2024
Method for generating a control scheme and device manufacturing method2024
Device manufacturing methods2024
Device manufacturing methods2024
Method and apparatus for optimization of lithographic process2024
Method to label substrates based on process parameters2024
Method for monitoring lithographic apparatus2024
Method and apparatus to determine a patterning process parameter2024