Protective layers for processing chamber components

Assignee

• Applied Materials

Inventors

• Karthikeyan Balaraman (7 patents)
• Balamurugan Ramasamy (5 patents)
• Kartik Shah (68 patents)
• Mats Larsson (29 patents)
• Kevin A. PAPKE (12 patents)
• Rajasekhar PATIBANDLA (4 patents)
• Sathyanarayana Bindiganavale (2 patents)
• Umesh M. Kelkar (27 patents)

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