Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Hybrid BEOL metallization utilizing selective reflection mask

Hybrid BEOL metallization utilizing selective reflection mask

US Patent 10957646 · Granted Mar 23, 2021

Estimated economic value: $2,115,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reduced capacitance between power via bar and gates2025
Backside self aligned skip via2025
Airgap spacer for power via2025
Semiconductor passive device integration for silicon-on-insulator substrate2025
Self-forming barrier for use in air gap formation2025
Early backside first power delivery network2025
Power distribution network with backside power rail2025
Source/drain contact at tight cell boundary2025
Etch back and film profile shaping of selective dielectric deposition2025
BEOL interconnect subtractive etch super via2025
BEOL interconnect subtractive etch super via2025
Backside power rail with tight space2025