Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate holder, a lithographic apparatus and method of manufacturing devices

Substrate holder, a lithographic apparatus and method of manufacturing devices

US Patent 10895808 · Granted Jan 19, 2021

Estimated economic value: $58,604,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Temperature conditioning system, a lithographic apparatus and a method of temper2025
Substrate support and substrate table2025
Substrate support and substrate table2025
Substrate holder for use in a lithographic apparatus2025
Method of manufacturing a substrate support for a lithographic apparatus, substr2025
Hollow-core photonic crystal fiber based optical component for broadband radiati2025
Stage system, lithographic apparatus, method for positioning and device manufact2025
Stage system, lithographic apparatus, method for positioning and device manufact2025
Support table for a lithographic apparatus, method of loading a substrate, litho2024
Fluid handling structure for lithographic apparatus2024
Stage system, lithographic apparatus, method for positioning and device manufact2024
Stage system, lithographic apparatus, method for positioning and device manufact2024