Plasma processing apparatus and plasma processing method

Assignee

• Tokyo Electron Limited

Inventors

• Toshiya Tsukahara (4 patents)
• Shuhei Yamabe (6 patents)
• Kota Yachi (1 patents)
• Tetsuji Sato (26 patents)
• Yohei Uchida (30 patents)
• Ayuta Suzuki (10 patents)
• Yosuke Tamura (9 patents)
• Hidetoshi Hanaoka (22 patents)
• Junichi Sasaki (60 patents)

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