Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma processing apparatus and mounting table thereof

Plasma processing apparatus and mounting table thereof

US Patent 12293937 · Granted May 6, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Motorcycle and/or replica thereof2025
Gas supply device and semiconductor manufacturing apparatus2025
Substrate processing apparatus2025
Plasma monitoring system, plasma monitoring method, and monitoring device2025
Substrate processing apparatus, substrate processing system, and maintenance met2025
Plasma processing apparatus2024
Electrostatic chuck, focus ring, support base, plasma processing apparatus, and 2024
Substrate processing apparatus, substrate processing system, and maintenance met2024
Processing system2024
Plasma processing apparatus2024
Workpiece placement apparatus and processing apparatus2024
Plasma processing apparatus and plasma processing method2023