Deposition device and deposition method

Assignee

• Tokyo Electron Limited

Inventors

• Yasuhiko Kojima (68 patents)
• Hiroshi Sone (20 patents)
• Atsushi Gomi (36 patents)
• Kanto Nakamura (10 patents)
• Toru Kitada (10 patents)
• Yasunobu Suzuki (25 patents)
• Yusuke Suzuki (226 patents)
• Koichi Takatsuki (7 patents)
• Tatsuo Hirasawa (10 patents)
• Keisuke Sato (78 patents)
• Chiaki Yasumuro (7 patents)
• Atsushi Shimada (63 patents)

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