Radio frequency extraction system for charge neutralized ion beam

Assignee

• Varian Semiconductor Equipment Associates

Inventors

• Costel Biloiu (47 patents)
• Piotr Lubicki (16 patents)
• Tyler Rockwell (13 patents)
• Christopher Campbell (23 patents)
• Vikram Singh (49 patents)
• Kevin M. Daniels (25 patents)
• Richard J. Hertel (34 patents)
• Peter F. Kurunczi (47 patents)
• Alexandre Likhanskii (44 patents)

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