Issued Patents All Time
Showing 26–50 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8456610 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2013-06-04 |
| 8194229 | Dynamic fluid control system for immersion lithography | — | 2012-06-05 |
| 8089610 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2012-01-03 |
| 7916274 | Measurement of EUV intensity | — | 2011-03-29 |
| 7876452 | Interferometric position-measuring devices and methods | Bausan Yuan, Masahiko Okumura, Yosuke Shirata, Kiyoshi Uchikawa, Saburo Kamiya +1 more | 2011-01-25 |
| 7875864 | Devices and methods for thermophoretic and electrophoretic reduction of particulate contamination of lithographic reticles and other objects | — | 2011-01-25 |
| 7804583 | EUV reticle handling system and method | Alton H. Phillips, Douglas C. Watson | 2010-09-28 |
| 7709813 | Incidence surfaces and optical windows that are solvophobic to immersion liquids | — | 2010-05-04 |
| 7598508 | Gaseous extreme-ultraviolet spectral purity filters and optical systems comprising same | — | 2009-10-06 |
| 7580112 | Containment system for immersion fluid in an immersion lithography apparatus | — | 2009-08-25 |
| 7554648 | Blind devices and methods for providing continuous thermophoretic protection of lithographic reticle | — | 2009-06-30 |
| 7548303 | Cooling assembly for a stage | — | 2009-06-16 |
| 7477358 | EUV reticle handling system and method | Alton H. Phillips, Douglas C. Watson | 2009-01-13 |
| 7456930 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2008-11-25 |
| 7426014 | Dynamic fluid control system for immersion lithography | — | 2008-09-16 |
| 7367138 | Devices and methods for thermophoretic and electrophoretic reduction of particulate contamination of lithographic reticles | — | 2008-05-06 |
| 7355676 | Environmental system including vacuum scavenge for an immersion lithography apparatus | — | 2008-04-08 |
| 7342641 | Autofocus methods and devices for lithography | — | 2008-03-11 |
| 7323698 | Thermally insulated thermophoretic plate | — | 2008-01-29 |
| 7321415 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2008-01-22 |
| 7250618 | Radiantly heated cathode for an electron gun and heating assembly | Mark Takita | 2007-07-31 |
| 7244611 | Methods and devices for hybridization and binding assays using thermophoresis | — | 2007-07-17 |
| 7236232 | Using isotopically specified fluids as optical elements | — | 2007-06-26 |
| 7224435 | Using isotopically specified fluids as optical elements | — | 2007-05-29 |
| 7162881 | Thermophoretic wand to protect front and back surfaces of an object | — | 2007-01-16 |