Issued Patents All Time
Showing 51–75 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7030959 | Extreme ultraviolet reticle protection using gas flow thermophoresis | — | 2006-04-18 |
| 6989922 | Deformable mirror actuation system | Alton H. Phillips | 2006-01-24 |
| 6925478 | Practical pseudo-asynchronous filter architecture | Alireza Jabbari, David Stumbo | 2005-08-02 |
| 6903346 | Stage assembly having a follower assembly | Michael Kovalerchik, Douglas C. Watson | 2005-06-07 |
| 6897940 | System for correcting aberrations and distortions in EUV lithography | — | 2005-05-24 |
| 6864601 | Electric motors with reduced stray magnetic fields | — | 2005-03-08 |
| 6794657 | Magnetic shunt assembly for an exposure apparatus | — | 2004-09-21 |
| 6770987 | Brushless electric motors with reduced stray AC magnetic fields | Denis F. Spicer, Christopher T. Black | 2004-08-03 |
| 6734117 | Periodic clamping method and apparatus to reduce thermal stress in a wafer | — | 2004-05-11 |
| 6628503 | Gas cooled electrostatic pin chuck for vacuum applications | — | 2003-09-30 |
| 6529260 | Lifting support assembly for an exposure apparatus | — | 2003-03-04 |
| 6455956 | Two-dimensional electric motor | — | 2002-09-24 |
| 6402380 | Fluid bearing operable in a vacuum region | — | 2002-06-11 |
| 6376329 | Semiconductor wafer alignment using backside illumination | John H. McCoy | 2002-04-23 |
| 6302585 | Two Axis stage with arcuate surface bearings | Martin E. Lee | 2001-10-16 |
| 6287004 | Fluid bearing operable in a vacuum region | — | 2001-09-11 |
| 6215642 | Vacuum compatible, deformable electrostatic chuck with high thermal conductivity | — | 2001-04-10 |
| 6132091 | X-Y stage with arcuate surface bearings | Martin E. Lee | 2000-10-17 |
| 6126169 | Air bearing operable in a vacuum region | Denis F. Spicer | 2000-10-03 |
| 6127749 | Two-dimensional electric motor | — | 2000-10-03 |
| 6014200 | High throughput electron beam lithography system | John H. McCoy | 2000-01-11 |
| 5954982 | Method and apparatus for efficiently heating semiconductor wafers or reticles | — | 1999-09-21 |
| 5870197 | Precision stage interferometer system with local single air duct | John K. Eaton, Kyoichi Suwa, Naoyuki Kobayashi | 1999-02-09 |
| 5866935 | Tunneling device | — | 1999-02-02 |
| 5784166 | Position resolution of an interferometrially controlled moving stage by regression analysis | — | 1998-07-21 |