Issued Patents All Time
Showing 76–79 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5708505 | Laser interferometer having a sheath for the laser beam | Martin E. Lee | 1998-01-13 |
| 5631731 | Method and apparatus for aerial image analyzer | — | 1997-05-20 |
| 5602619 | Scanner for step and scan lithography system | — | 1997-02-11 |
| 5552888 | Apparatus for measuring position of an X-Y stage | Martin E. Lee | 1996-09-03 |