Issued Patents All Time
Showing 101–125 of 133 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5994708 | Demagnifying charged-particle lithography apparatus | — | 1999-11-30 |
| 5994704 | Electromagnetic deflector | — | 1999-11-30 |
| 5986765 | Apparatus including compensation mask to correct particle beam proximity-effect | — | 1999-11-16 |
| 5981947 | Apparatus for detecting or collecting secondary electrons, charged-particle beam exposure apparatus comprising same, and related methods | Teruaki Okino, Noriyuki Hirayanagi | 1999-11-09 |
| 5977550 | Charged-particle-beam optical systems | — | 1999-11-02 |
| 5973333 | Charged-particle-beam pattern-transfer apparatus and methods | Teruaki Okino | 1999-10-26 |
| 5958626 | Mask used in charged particle beam projecting apparatus and method for dividing pattern | — | 1999-09-28 |
| 5952133 | Methods for evaluating image-forming characteristics of a projection-optical system used in a charged-particle-beam microlithography apparatus | — | 1999-09-14 |
| 5933217 | Electron-beam projection-microlithography apparatus and methods | Teruaki Okino | 1999-08-03 |
| 5895925 | Mask used in charged particle beam projecting apparatus and method for dividing pattern | — | 1999-04-20 |
| 5894132 | Charged-particle-beam projection-exposure apparatus with focus and tilt adjustments | Shohei Suzuki | 1999-04-13 |
| 5892224 | Apparatus and methods for inspecting wafers and masks using multiple charged-particle beams | — | 1999-04-06 |
| 5888682 | Method of using a compensation mask to correct particle beam proximity-effect | — | 1999-03-30 |
| 5847402 | Charged particle beam pattern transfer apparatus and method | — | 1998-12-08 |
| 5831274 | Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus | — | 1998-11-03 |
| 5831270 | Magnetic deflectors and charged-particle-beam lithography systems incorporating same | — | 1998-11-03 |
| 5798194 | Masks for charged-particle beam microlithography | Shintaro Kawata | 1998-08-25 |
| 5773837 | Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus | — | 1998-06-30 |
| 5773838 | Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus | — | 1998-06-30 |
| 5770863 | Charged particle beam projection apparatus | — | 1998-06-23 |
| 5763893 | Electron gun and electron-beam transfer apparatus comprising same | — | 1998-06-09 |
| 5753922 | Electromagnetic deflector | — | 1998-05-19 |
| 5751538 | Mask holding device and method for holding mask | — | 1998-05-12 |
| 5747819 | Charged particle beam transfer device exhibiting low aberration | Hiroyasu Simizu | 1998-05-05 |
| 5689117 | Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus | — | 1997-11-18 |