Issued Patents All Time
Showing 126–133 of 133 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629526 | Electro-magnetic lens, charged particle beam transferring apparatus, and method for manufacturing electro-magnetic lens | — | 1997-05-13 |
| 5624774 | Method for transferring patterns with charged particle beam | Teruaki Okino | 1997-04-29 |
| 4743766 | Method of drawing a desired pattern on a target through exposure thereof with an electron beam | Izumi Kasahara | 1988-05-10 |
| 4684809 | Method of adjusting optical column in energy beam exposure system | — | 1987-08-04 |
| 4647782 | Charged particle beam exposure apparatus | Hirotsugu Wada, Shunichi Sano, Ryoichi Yoshikawa | 1987-03-03 |
| 4543512 | Electron beam exposure system | Hirotsugu Wada | 1985-09-24 |
| 4346325 | Electron gun | Hirotsugu Wada | 1982-08-24 |
| 4218621 | Electron beam exposure apparatus | Toshiaki Shinozaki | 1980-08-19 |