Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4741622 | Method and apparatus for detecting diversion | Masaichi Murakami | 1988-05-03 |
| 4734746 | Exposure method and system for photolithography | Kazuo Ushida, Satoru Anzai, Kazuaki Suzuki, Toshio Matsuura, Koichi Matsumoto | 1988-03-29 |
| 4704020 | Projection optical apparatus | Masaichi Murakami, Hidemi Kawai | 1987-11-03 |
| 4699515 | Process of transfer of mask pattern onto substrate and apparatus for alignment therebetween | Akikazu Tanimoto, Toshio Matsuura | 1987-10-13 |
| 4679942 | Method of aligning a semiconductor substrate and a photomask | Hidemi Kawai, Masaichi Murakami | 1987-07-14 |
| 4677301 | Alignment apparatus | Akikazu Tanimoto, Toshio Matsuura, Seiro Murakami, Makoto Uehara | 1987-06-30 |
| 4666273 | Automatic magnification correcting system in a projection optical apparatus | Hisayuki Shimizu, Satoru Anzai, Hiroshi Tanaka | 1987-05-19 |
| 4657379 | Photomask and exposure apparatus using the same | — | 1987-04-14 |
| 4650983 | Focusing apparatus for projection optical system | — | 1987-03-17 |
| 4592625 | Double-conjugate maintaining optical system | Makoto Uehara, Satoru Anzai | 1986-06-03 |
| 4566795 | Alignment apparatus | Toshio Matsuura | 1986-01-28 |
| 4531060 | Positioning method | Kazuo Kuramochi, Kiwao Nakazawa | 1985-07-23 |
| 4465368 | Exposure apparatus for production of integrated circuit | Toshio Matsuura, Hisayuki Shimizu, Akikazu Tanimoto | 1984-08-14 |
| 4423959 | Positioning apparatus | Kiwao Nakazawa, Shoichiro Yoshida | 1984-01-03 |
| 4390279 | Alignment device in an IC projection exposure apparatus | — | 1983-06-28 |