Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8842296 | Methods and devices for reducing errors in Goos-Hänchen corrections of displacement data | Michael Sogard, Daniel Gene Smith | 2014-09-23 |
| 8705170 | High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locations | Michael Binnard, Douglas C. Watson | 2014-04-22 |
| 8317344 | High NA annular field catoptric projection optics using Zernike polynomial mirror surfaces | Daniel Gene Smith | 2012-11-27 |
| 8305559 | Exposure apparatus that utilizes multiple masks | Shane R. Palmer | 2012-11-06 |
| 8116342 | Variable attenuator device and method | Daniel Gene Smith, Hirohisa Tanaka | 2012-02-14 |
| 7936260 | Identifying redundant alarms by determining coefficients of correlation between alarm categories | Michael J. Sidey | 2011-05-03 |
| 7909245 | Network based method of providing access to information | Deborah Chaskin | 2011-03-22 |
| 7701640 | Projection optical system and method for photolithography and exposure apparatus and method using same | Yasuhiro Omura, Hironori Ikezawa | 2010-04-20 |
| 7612892 | Imaging optical system configured with through the lens optics for producing control information | Daniel Gene Smith, W. Thomas Novak | 2009-11-03 |
| 7527192 | Network based method of providing access to information | Deborah Chaskin | 2009-05-05 |
| 7362508 | Projection optical system and method for photolithography and exposure apparatus and method using same | Yasuhiro Omura, Hironori Ikezawa | 2008-04-22 |
| 6486940 | High numerical aperture catadioptric lens | — | 2002-11-26 |
| 5966216 | On-axix mask and wafer alignment system | Daniel N. Galburt | 1999-10-12 |
| 5956192 | Four mirror EUV projection optics | — | 1999-09-21 |
| 5815310 | High numerical aperture ring field optical reduction system | — | 1998-09-29 |
| 5537260 | Catadioptric optical reduction system with high numerical aperture | — | 1996-07-16 |
| 5212593 | Broad band optical reduction system using matched multiple refractive element materials | Satish Desai | 1993-05-18 |
| 4953960 | Optical reduction system | — | 1990-09-04 |