Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8999627 | Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp | David K. Lam, Theodore A. Prescop, Cong Tran | 2015-04-07 |
| 6211518 | Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments | Neil Richardson, Farid Askary, Stefano E. Concina, David L. Adler | 2001-04-03 |
| 5869833 | Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments | Neil Richardson, Farid Askary, Stefano E. Concina, David L. Adler | 1999-02-09 |
| 5493116 | Detection system for precision measurements and high resolution inspection of high aspect ratio structures using particle beam devices | Guillermo L. Toro-Lira, Alan H. Achilles, Nolan V. Frederick, Philip R. Rigg | 1996-02-20 |
| 5302828 | Scanning techniques in particle beam devices for reducing the effects of surface charge accumulation | — | 1994-04-12 |
| 5155359 | Atomic scale calibration system | — | 1992-10-13 |
| 4972072 | System for detecting a film layer on an object | Hugo Hauser | 1990-11-20 |