Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5493116 | Detection system for precision measurements and high resolution inspection of high aspect ratio structures using particle beam devices | Guillermo L. Toro-Lira, Nolan V. Frederick, Kevin M. Monahan, Philip R. Rigg | 1996-02-20 |
| 5176493 | High speed wafer handling method | Guillermo L. Toro-Lira, Alan C. Abel | 1993-01-05 |
| 5098245 | High speed wafer handler | Guillermo L. Toro-Lira, Alan C. Abel | 1992-03-24 |