| 9620332 |
Charged particle beam substrate inspection using both vector and raster scanning |
David K. Lam, Kevin M. Monahan, Enden David Liu, Theodore A. Prescop |
2017-04-11 |
| 9466463 |
Charged particle beam substrate inspection using both vector and raster scanning |
David K. Lam, Kevin M. Monahan, Enden David Liu, Theodore A. Prescop |
2016-10-11 |
| 9207539 |
Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems |
David K. Lam, Kevin M. Monahan, Theodore A. Prescop |
2015-12-08 |
| 9184027 |
Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp |
David K. Lam, Kevin M. Monahan, Theodore A. Prescop |
2015-11-10 |
| 8999628 |
Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems |
David K. Lam, Kevin M. Monahan, Theodore A. Prescop |
2015-04-07 |
| 8999627 |
Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp |
David K. Lam, Kevin M. Monahan, Theodore A. Prescop |
2015-04-07 |
| 8350654 |
Principles of the tran-energy machines |
— |
2013-01-08 |