Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620332 | Charged particle beam substrate inspection using both vector and raster scanning | David K. Lam, Kevin M. Monahan, Enden David Liu, Theodore A. Prescop | 2017-04-11 |
| 9466463 | Charged particle beam substrate inspection using both vector and raster scanning | David K. Lam, Kevin M. Monahan, Enden David Liu, Theodore A. Prescop | 2016-10-11 |
| 9207539 | Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems | David K. Lam, Kevin M. Monahan, Theodore A. Prescop | 2015-12-08 |
| 9184027 | Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp | David K. Lam, Kevin M. Monahan, Theodore A. Prescop | 2015-11-10 |
| 8999628 | Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems | David K. Lam, Kevin M. Monahan, Theodore A. Prescop | 2015-04-07 |
| 8999627 | Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp | David K. Lam, Kevin M. Monahan, Theodore A. Prescop | 2015-04-07 |
| 8350654 | Principles of the tran-energy machines | — | 2013-01-08 |