EL

Enden David Liu

MU Multibeam: 2 patents #7 of 12Top 60%
Overall (All Time): #1,978,642 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9620332 Charged particle beam substrate inspection using both vector and raster scanning David K. Lam, Kevin M. Monahan, Cong Tran, Theodore A. Prescop 2017-04-11
9466463 Charged particle beam substrate inspection using both vector and raster scanning David K. Lam, Kevin M. Monahan, Cong Tran, Theodore A. Prescop 2016-10-11