Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11063756 | Secure intra-chip hardware micro-segmentation using charged particle beam processing | Kevin M. Monahan, David K. Lam | 2021-07-13 |
| 11037756 | Precision substrate material multi-processing using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Michael C. Smayling | 2021-06-15 |
| 10734192 | Precision substrate material multi-processing using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Michael C. Smayling | 2020-08-04 |
| 10658153 | Precision substrate material multi-processing using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Michael C. Smayling | 2020-05-19 |
| 10659229 | Secure permanent integrated circuit personalization | Michael C. Smayling, David K. Lam, Kevin M. Monahan | 2020-05-19 |
| 10607845 | Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2020-03-31 |
| 10523433 | Secure intra-chip hardware micro-segmentation using charged particle beam processing | Kevin M. Monahan, David K. Lam | 2019-12-31 |
| 10341108 | Secure permanent integrated circuit personalization | Michael C. Smayling, David K. Lam, Kevin M. Monahan | 2019-07-02 |
| 10026589 | Alignment and registration targets for charged particle beam substrate patterning and inspection | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2018-07-17 |
| 10020166 | Alignment and registration targets for charged particle beam substrate patterning and inspection | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2018-07-10 |
| 10020200 | Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2018-07-10 |
| 9881817 | Precision substrate material multi-processing using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Michael C. Smayling | 2018-01-30 |
| 9822443 | Precision material modification using miniature-column charged particle beam arrays | Michael C. Smayling, Kevin M. Monahan, David K. Lam | 2017-11-21 |
| 9824859 | Precision material modification using miniature-column charged particle beam arrays | Michael C. Smayling, Kevin M. Monahan, David K. Lam | 2017-11-21 |
| 9673114 | Precision substrate material removal using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Michael C. Smayling | 2017-06-06 |
| 9620332 | Charged particle beam substrate inspection using both vector and raster scanning | David K. Lam, Kevin M. Monahan, Enden David Liu, Cong Tran | 2017-04-11 |
| 9595419 | Alignment and registration targets for multiple-column charged particle beam lithography and inspection | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2017-03-14 |
| 9556521 | Precision deposition using miniature-column charged particle beam arrays | Kevin M. Monahan, David K. Lam, Michael C. Smayling | 2017-01-31 |
| 9478395 | Alignment and registration targets for multiple-column charged particle beam lithography and inspection | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2016-10-25 |
| 9466463 | Charged particle beam substrate inspection using both vector and raster scanning | David K. Lam, Kevin M. Monahan, Enden David Liu, Cong Tran | 2016-10-11 |
| 9466464 | Precision substrate material removal using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Michael C. Smayling | 2016-10-11 |
| 9453281 | Precision deposition using miniature-column charged particle beam arrays | Kevin M. Monahan, David K. Lam, Michael C. Smayling | 2016-09-27 |
| 9207539 | Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems | David K. Lam, Kevin M. Monahan, Cong Tran | 2015-12-08 |
| 9184027 | Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp | David K. Lam, Kevin M. Monahan, Cong Tran | 2015-11-10 |
| 8999628 | Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems | David K. Lam, Kevin M. Monahan, Cong Tran | 2015-04-07 |