Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5963830 | Method of forming a TiN/W barrier layer for a hot Al plug | Yeong-Ruey Shiue, Yung-Tsun Lo, Hsien-Liang Meng | 1999-10-05 |
| 5776833 | Method for forming metal plug | Hsi-Chieh Chen, Champion Yi, Yeong-Ruey Shiue | 1998-07-07 |
| 5770515 | Method of in-situ wafer cooling for a sequential WSI/alpha -Si sputtering process | Hsien-Liang Meng, Elvis Huang, Yeong Rvey Shiue | 1998-06-23 |
| 5670016 | Method for cleaning substrate prior to tungsten deposition | Mao-Chieh Chen, Wen-Kuan Yeh, Lu Liu | 1997-09-23 |
| 5629237 | Taper etching without re-entrance profile | Kuei-Lung Chou, Jiunn-Jyi Lin, Hsien-Wen Chang | 1997-05-13 |
| 5180689 | Tapered opening sidewall with multi-step etching process | Hsien-Tsung Liu, Jin-Yuan Lee, Jiann-Kwang Wang, Chue-San Yoo | 1993-01-19 |