Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5670016 | Method for cleaning substrate prior to tungsten deposition | Wen-Kuan Yeh, Pei-Jan Wang, Lu Liu | 1997-09-23 |
| 5457069 | Process for fabricating device having titanium-tungsten barrier layer and silicide layer contacted shallow junction simultaneously formed | Fann-Mei Yang | 1995-10-10 |
| 5024954 | Method of improving high temperature stability of PTSI/SI structure | Bing-Yue Tsui, Jiunn-Yann Tsai | 1991-06-18 |