Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5770515 | Method of in-situ wafer cooling for a sequential WSI/alpha -Si sputtering process | Hsien-Liang Meng, Pei-Jan Wang, Yeong Rvey Shiue | 1998-06-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5770515 | Method of in-situ wafer cooling for a sequential WSI/alpha -Si sputtering process | Hsien-Liang Meng, Pei-Jan Wang, Yeong Rvey Shiue | 1998-06-23 |