Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529274 | Chucking system with recessed support feature | Mahadevan GanapathiSubramanian, Avinash Panga, Byung-Jin Choi | 2016-12-27 |
| 8968620 | Safe separation for nano imprinting | Se-Hyuk Im, Mahadevan GanapathiSubramanian, Edward Brian Fletcher, Niyaz Khusnatdinov, Gerard Schmid +4 more | 2015-03-03 |
| 8913230 | Chucking system with recessed support feature | Mahadevan GanapathiSubramanian, Avinash Panga, Byung-Jin Choi | 2014-12-16 |
| 8652393 | Strain and kinetics control during separation phase of imprint process | Niyaz Khusnatdinov, Frank Y. Xu, Michael Nevin Miller, Ecron D. Thompson, Gerard Schmid +3 more | 2014-02-18 |
| 8556616 | Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template | Douglas J. Resnick, Byung-Jin Choi, Sidlgata V. Sreenivasan | 2013-10-15 |
| 8318066 | Step and repeat imprint lithography process | Sidlgata V. Sreenivasan, Byung-Jin Choi, Norman E. Schumaker, Ronald D. Voisin, Michael Watts | 2012-11-27 |
| 8215946 | Imprint lithography system and method | Mahadevan GanapathiSubramanian, Byung-Jin Choi | 2012-07-10 |
| 7943081 | Step and repeat imprint lithography processes | Sidlgata V. Sreenivasan, Byung-Jin Choi, Norman E. Schumaker, Ronald D. Voisin, Michael Watts | 2011-05-17 |
| 7874831 | Template having a silicon nitride, silicon carbide or silicon oxynitride film | Douglas J. Resnick, Kosta S. Selinidis, Frank Y. Xu | 2011-01-25 |
| 7727453 | Step and repeat imprint lithography processes | Sidlgata V. Sreenivasan, Byung-Jin Choi, Norman E. Schumaker, Ronald D. Voisin, Michael Watts | 2010-06-01 |
| 7641840 | Method for expelling gas positioned between a substrate and a mold | Byung-Jin Choi, Mahadevan GanapathiSubramanian, Yeong-Jun Choi | 2010-01-05 |
| 7635445 | Method of separating a mold from a solidified layer disposed on a substrate | Byung-Jin Choi, Anshuman Cherala, Yeong-Jun Choi, Sidlgata V. Sreenivasan, Norman E. Schumaker +3 more | 2009-12-22 |
| 7420654 | Method of varying dimensions of a substrate during nano-scale manufacturing | Anshuman Cherala, Byung-Jin Choi, Pawan Kumar Nimmakayala, Sidlgata V. Sreenivasan | 2008-09-02 |
| 7338275 | Formation of discontinuous films during an imprint lithography process | Byung-Jin Choi, Sidlagata V. Sreenivasan, Michael Watts | 2008-03-04 |
| 7298456 | System for varying dimensions of a substrate during nanoscale manufacturing | Anshuman Cherala, Byung-Jin Choi, Pawan Kumar Nimmakayala, Sidlgata V. Sreenivasan | 2007-11-20 |
| 7224443 | Imprint lithography substrate processing tool for modulating shapes of substrates | Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, Daniel Babbs +2 more | 2007-05-29 |
| 7170589 | Apparatus to vary dimensions of a substrate during nano-scale manufacturing | Anshuman Cherala, Byung-Jin Choi, Pawan Kumar Nimmakayala, Sidlgata V. Sreenivasan | 2007-01-30 |
| 7150622 | Systems for magnification and distortion correction for imprint lithography processes | Byung-Jin Choi, Sidlgata V. Sreenivasan | 2006-12-19 |
| 7077992 | Step and repeat imprint lithography processes | Sidlgata V. Sreenivasan, Byung-Jin Choi, Norman E. Schumaker, Ronald D. Voisin, Michael Watts | 2006-07-18 |
| 7019819 | Chucking system for modulating shapes of substrates | Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, Daniel Babbs +2 more | 2006-03-28 |
| 6982783 | Chucking system for modulating shapes of substrates | Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, Daniel Babbs +2 more | 2006-01-03 |
| 6980282 | Method for modulating shapes of substrates | Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, C. Grant Willson +1 more | 2005-12-27 |
| 6951173 | Assembly and method for transferring imprint lithography templates | Byung-Jin Choi | 2005-10-04 |
| 6932934 | Formation of discontinuous films during an imprint lithography process | Byung-Jin Choi, Sidlagata V. Sreenivasan, Michael Watts | 2005-08-23 |
| 6900881 | Step and repeat imprint lithography systems | Sidlgata V. Sreenivasan, Michael Watts, Byung-Jin Choi, Norman E. Schumaker, Ronald D. Voisin | 2005-05-31 |