Issued Patents All Time
Showing 26–50 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003935 | Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer | Timothy R. Robinson, Mark Attwood, Xing Chen, William M. Holber, Mark Philip Longson +2 more | 2011-08-23 |
| 8003936 | Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer | Timothy R. Robinson, Mark Attwood, Xing Chen, William M. Holber, Mark Philip Longson +2 more | 2011-08-23 |
| 7914603 | Particle trap for a plasma source | Xing Chen, Andrew Cowe, David M. Burtner, William Robert Entley, ShouQian Shao | 2011-03-29 |
| 7829353 | Pulsed mass flow delivery system and method | Siddharth P. Nagarkatti, Matthew Besen, William R. Clark, Daniel Smith, Bora Akgerman | 2010-11-09 |
| 7809473 | Apparatus and method for pressure fluctuation insensitive mass flow control | Nicholas Kottenstette, Jesse Ambrosnia | 2010-10-05 |
| 7764140 | Radio frequency power delivery system | Siddharth P. Nagarkatti, Michael Kishinevsky, Timothy E. Kalvaitis, William McKinney, Daniel Goodman +3 more | 2010-07-27 |
| 7628860 | Pulsed mass flow delivery system and method | Siddharth P. Nagarkatti, Matthew Besen, William R. Clark, Daniel Smith, Bora Akgerman | 2009-12-08 |
| 7615120 | Pulsed mass flow delivery system and method | Siddharth P. Nagarkatti, Matthew Besen, William R. Clark, Daniel Smith, Bora Akgerman | 2009-11-10 |
| 7552015 | Apparatus and method for displaying mass flow controller pressure | Nicholas Kottenstette, Jesse E. Ambrosina | 2009-06-23 |
| 7474968 | Critical flow based mass flow verifier | Junhua Ding, Kaveh Zarkar, Daniel Smith | 2009-01-06 |
| 7463991 | Mass flow verifier with flow restrictor | Daniel Smith | 2008-12-09 |
| 7424346 | Apparatus and method for pressure fluctuation insensitive mass flow control | Nicholas Kottenstette, Jesse E. Ambrosina | 2008-09-09 |
| 7174263 | External volume insensitive flow verification | Daniel Smith | 2007-02-06 |
| 7166187 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling | David Tao, Mathias Koch, Douglas Brown, Hossein Zarrin | 2007-01-23 |
| 7136767 | Apparatus and method for calibration of mass flow controller | Nicholas Kottenstette, Jesse E. Ambrosina | 2006-11-14 |
| 7121139 | Thermal mass flow rate sensor having fixed bypass ratio | Paul Meneghini, Daniel Smith | 2006-10-17 |
| 7120542 | Flow monitoring system | Nicholas Kottenstette, Louis R. Slamka, Siddharth P. Nagarkatti | 2006-10-10 |
| 7107834 | Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects | Paul Meneghini | 2006-09-19 |
| 7073771 | Porous valve assembly | Ronald W. Collins, Jr., Matthew Besen | 2006-07-11 |
| 7072743 | Semiconductor manufacturing gas flow divider system and method | Siddharth P. Nagarkatti | 2006-07-04 |
| 7007707 | Mass flow ratio system and method | Jesse E. Ambrosina, Nicholas Kottenstette | 2006-03-07 |
| 7004191 | Apparatus and method for mass flow controller with embedded web server | Nicholas Kottenstette, Jesse E. Ambrosina | 2006-02-28 |
| 7000463 | Reynolds number correction function for mass flow rate sensor | Paul Meneghini | 2006-02-21 |
| 6986359 | System and method for controlling pressure in remote zones | Siddharth P. Nagarkatti | 2006-01-17 |
| 6948508 | Apparatus and method for self-calibration of mass flow controller | Nicholas Kottenstette, Jesse E. Ambrosina, John A. Smith | 2005-09-27 |