Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7330265 | Appearance inspection apparatus and projection method for projecting image of sample under inspection | Toshiro Kurosawa, Shohei Yamazaki | 2008-02-12 |
| 6551847 | Inspection analyzing apparatus and semiconductor device | Kyoko Asahina, Kaoru Yamana | 2003-04-22 |
| 6528334 | Semiconductor inspection system, and method of manufacturing a semiconductor device | Mariko Mizuo | 2003-03-04 |
| 6437862 | Defect inspection apparatus | Masahiko Ikeno | 2002-08-20 |
| 6400038 | Alignment method and semiconductor device | Toshiaki Mugibayashi | 2002-06-04 |
| 6344897 | Inspection apparatus for foreign matter and pattern defect | Toshiaki Mugibayashi | 2002-02-05 |
| 6295126 | Inspection apparatus for foreign matter and pattern defect | Toshiaki Mugibayashi | 2001-09-25 |
| 6242318 | Alignment method and semiconductor device | Toshiaki Mugibayashi | 2001-06-05 |
| 6031607 | System and method for inspecting pattern defect | — | 2000-02-29 |
| 6016562 | Inspection data analyzing apparatus for in-line inspection with enhanced display of inspection results | Nobuyoshi Hattori, Junko Izumitani, Masahiko Ikeno | 2000-01-18 |
| 5379150 | Method of manufacturing a spatial frequency filter for use in a pattern defect detection device | Toshimasa Tomoda, Hitoshi Tanaka, Nobuyuki Kosaka, Toyomi Ohshige | 1995-01-03 |
| 5289260 | Pattern defect detection device and a spatial frequency filter used therein | Toshimasa Tomoda, Hitoshi Tanaka, Nobuyuki Kosaka, Toyomi Ohshige | 1994-02-22 |
| 5170063 | Inspection device for detecting defects in a periodic pattern on a semiconductor wafer | Hitoshi Tanaka, Nobuyuki Kosaka, Toshimasa Tomoda | 1992-12-08 |