Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8205313 | Structure for attaching vibration insulating member | Yoshikazu Kaneyasu, Taiki Yanase, Takeshi Chiba | 2012-06-26 |
| 7647955 | Filler pipe assembly | Shinya Murabayashi, Shoichiro Kumagai, Tsuyoshi Chou, Keiichiro Tachisako | 2010-01-19 |
| 5976260 | Semiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatus | Yoshimi Kinoshita, Tomoyuki Kanda, Katsuhisa Kitano, Kazuo Yoshida, Hiroshi Ohnishi +9 more | 1999-11-02 |
| 5534073 | Semiconductor producing apparatus comprising wafer vacuum chucking device | Yoshimi Kinoshita, Tomoyuki Kanda, Katsuhisa Kitano, Kazuo Yoshida, Hiroshi Ohnishi +9 more | 1996-07-09 |
| 5481095 | Code reading pattern and an image pickup apparatus for reading the pattern | Hiroshi Mitsuda, Masahiko Sakamoto, Hitoshi Tanaka, Yoshinori Ito | 1996-01-02 |
| 5379150 | Method of manufacturing a spatial frequency filter for use in a pattern defect detection device | Yoko Miyazaki, Toshimasa Tomoda, Hitoshi Tanaka, Toyomi Ohshige | 1995-01-03 |
| 5317618 | Light transmission type vacuum separating window and soft X-ray transmitting window | Takehiko Nakahara, Masao Koshinaka | 1994-05-31 |
| 5305366 | Thin film forming apparatus | Takehiko Nakahara, Masao Koshinaka, Toshimasa Tomoda | 1994-04-19 |
| 5289260 | Pattern defect detection device and a spatial frequency filter used therein | Yoko Miyazaki, Toshimasa Tomoda, Hitoshi Tanaka, Toyomi Ohshige | 1994-02-22 |
| 5170063 | Inspection device for detecting defects in a periodic pattern on a semiconductor wafer | Yoko Miyazaki, Hitoshi Tanaka, Toshimasa Tomoda | 1992-12-08 |