Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6636824 | Method of and apparatus for inspecting semiconductor device | Kouetsu Sawai, Toshiharu Katayama | 2003-10-21 |
| 6437862 | Defect inspection apparatus | Yoko Miyazaki | 2002-08-20 |
| 6016562 | Inspection data analyzing apparatus for in-line inspection with enhanced display of inspection results | Yoko Miyazaki, Nobuyoshi Hattori, Junko Izumitani | 2000-01-18 |
| 5264246 | Spin coating method | — | 1993-11-23 |
| 5155060 | Method for forming film of uniform thickness on semiconductor substrate having concave portion | Hideo Saeki, Hiroshi Kawashima | 1992-10-13 |
| 5135891 | Method for forming film of uniform thickness on semiconductor substrate having concave portion | Hideo Saeki, Hiroshi Kawashima | 1992-08-04 |
| 5095848 | Spin coating apparatus using a tilting chuck | — | 1992-03-17 |
| 4987477 | Solid state imaging device | — | 1991-01-22 |
| 4960658 | Color filter dyeing apparatus | Hideo Saeki | 1990-10-02 |
| 4886012 | Spin coating apparatus | Hiroshi Kawashima, Osamu Kaneda | 1989-12-12 |
| 4821675 | Color filter dyeing apparatus | Hideo Saeki | 1989-04-18 |