Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664549 | Wafer chuck, exposure system, and method of manufacturing semiconductor device | Seiichiro Kobayashi, Koichi Koyanagi, Teruo Honda, Masaharu Motohashi | 2003-12-16 |
| 5155060 | Method for forming film of uniform thickness on semiconductor substrate having concave portion | Masahiko Ikeno, Hiroshi Kawashima | 1992-10-13 |
| 5135891 | Method for forming film of uniform thickness on semiconductor substrate having concave portion | Masahiko Ikeno, Hiroshi Kawashima | 1992-08-04 |
| 5079595 | Organic thin film semiconductor device | Shoji Suzuki | 1992-01-07 |
| 4960658 | Color filter dyeing apparatus | Masahiko Ikeno | 1990-10-02 |
| 4824748 | Method of making a color separation filter including monomolecular film layers of coupled dyestuff | Shigeyuki Uematsu | 1989-04-25 |
| 4821675 | Color filter dyeing apparatus | Masahiko Ikeno | 1989-04-18 |
| 4745327 | Color separation filter including monomolecular film layers of coupled dyestuff | Shigeyuki Uematsu | 1988-05-17 |
| 4259407 | Radiation-sensitive positive resist | Tsukasa Tada, Yuzo Shimazaki, Masanobu Kohda, Hirohisa Kato | 1981-03-31 |