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Masaharu Motohashi

HC Hitachi Tokyo Electronics Co.: 1 patents #46 of 101Top 50%
Overall (All Time): #3,531,869 of 4,157,543Top 85%
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Patent #TitleCo-InventorsDate
6664549 Wafer chuck, exposure system, and method of manufacturing semiconductor device Seiichiro Kobayashi, Koichi Koyanagi, Teruo Honda, Hideo Saeki 2003-12-16