Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6769111 | Computer-implemented method of process analysis | Nobuyoshi Hattori | 2004-07-27 |
| 6741940 | Computer-implemented method of defect analysis | Nobuyoshi Hattori | 2004-05-25 |
| 6473665 | Defect analysis method and process control method | Nobuyoshi Hattori | 2002-10-29 |
| 6400038 | Alignment method and semiconductor device | Yoko Miyazaki | 2002-06-04 |
| 6344897 | Inspection apparatus for foreign matter and pattern defect | Yoko Miyazaki | 2002-02-05 |
| 6341241 | Defect analysis method and process control method | Nobuyoshi Hattori | 2002-01-22 |
| 6295126 | Inspection apparatus for foreign matter and pattern defect | Yoko Miyazaki | 2001-09-25 |
| 6242318 | Alignment method and semiconductor device | Yoko Miyazaki | 2001-06-05 |