Issued Patents All Time
Showing 26–50 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7541635 | Semiconductor fabrication using a collar | Kevin R. Shea, Niraj Rana, Zhiping Yin | 2009-06-02 |
| 7468323 | Method of forming high aspect ratio structures | Kevin R. Shea, Thomas M. Graettinger | 2008-12-23 |
| 7453134 | Integrated circuit device with a circuit element formed on an active region having rounded corners | Sukesh Sandhu | 2008-11-18 |
| 7378353 | High selectivity BPSG to TEOS etchant | Whonchee Lee | 2008-05-27 |
| 7354863 | Methods of selectively removing silicon | Kyle K. Kirby | 2008-04-08 |
| 7329576 | Double-sided container capacitors using a sacrificial layer | Gurtej S. Sandhu, Kevin R. Shea, Chris Hill | 2008-02-12 |
| 7261835 | Acid blend for removing etch residue | Donald L. Yates | 2007-08-28 |
| 7214978 | Semiconductor fabrication that includes surface tension control | Kevin R. Shea | 2007-05-08 |
| 7205245 | Method of forming trench isolation within a semiconductor substrate | Janos Fucsko, Grady S. Waldo, Li Li | 2007-04-17 |
| 7179717 | Methods of forming integrated circuit devices | Sukesh Sandhu | 2007-02-20 |
| 7109089 | Semiconductor fabrication using a collar | Kevin R. Shea, Niraj Rana, Zhiping Yin | 2006-09-19 |
| 7030034 | Methods of etching silicon nitride substantially selectively relative to an oxide of aluminum | Janos Fucsko, Grady S. Waldo, Li Li | 2006-04-18 |
| 6977230 | Methods of removing material from a semiconductor substrate | Garo Derderian | 2005-12-20 |
| RE38760 | Controlled etching of oxides via gas phase reactions | Robert W. Grant, Jerzy Ruzyllo | 2005-07-19 |
| 6783695 | Acid blend for removing etch residue | Donald L. Yates | 2004-08-31 |
| 6758938 | Delivery of dissolved ozone | Jonathan Morgan, Paul A. Morgan | 2004-07-06 |
| 6740593 | Semiconductor processing methods utilizing low concentrations of reactive etching components | Satish Bedge | 2004-05-25 |
| 6740597 | Methods of removing at least some of a material from a semiconductor substrate | Garo Derderian | 2004-05-25 |
| 6734089 | Techniques for improving wordline fabrication of a memory device | Yongjun Jeff Hu, Satish Bedge | 2004-05-11 |
| 6709983 | Semiconductor processing methods utilizing low concentrations of reactive etching components | Satish Bedge | 2004-03-23 |
| 6645874 | Delivery of dissolved ozone | Jonathan Morgan, Paul A. Morgan | 2003-11-11 |
| 6599683 | Photoresist developer with reduced resist toppling and method of using same | Yoshiki Hishiro | 2003-07-29 |
| 6589884 | Method of forming an inset in a tungsten silicide layer in a transistor gate stack | — | 2003-07-08 |
| 6576557 | Semiconductor processing methods | Satish Bedge | 2003-06-10 |
| 6562726 | Acid blend for removing etch residue | Donald L. Yates | 2003-05-13 |