Issued Patents All Time
Showing 1,276–1,300 of 1,397 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5851135 | System for real-time control of semiconductor wafer polishing | Trung T. Doan | 1998-12-22 |
| 5849628 | Method of producing rough polysilicon by the use of pulsed plasma chemical vapor deposition and products produced by same | Trung T. Doan | 1998-12-15 |
| 5846881 | Low cost DRAM metallization | Sujit Sharan | 1998-12-08 |
| 5842909 | System for real-time control of semiconductor wafer polishing including heater | Trung T. Doan | 1998-12-01 |
| 5844318 | Aluminum film for semiconductive devices | Ravi Iyer | 1998-12-01 |
| 5837564 | Method for optimal crystallization to obtain high electrical performance from chalcogenides | Alan R. Reinberg | 1998-11-17 |
| 5824365 | Method of inhibiting deposition of material on an internal wall of a chemical vapor deposition reactor | Ravi Iyer, Donald L. Westmoreland | 1998-10-20 |
| 5814852 | Method of forming a Ta.sub.2 O.sub.5 dielectric layer, method of forming a capacitor having a Ta.sub.2 O.sub.5 dielectric layer, and capacitor construction | Pierre C. Fazan | 1998-09-29 |
| 5812360 | Capacitor construction having an amorphous electrically conductive layer | Kris K. Brown | 1998-09-22 |
| 5800617 | Method to deposit highly conformal CVD films | — | 1998-09-01 |
| 5789317 | Low temperature reflow method for filling high aspect ratio contacts | Shubneesh Batra | 1998-08-04 |
| 5777739 | Endpoint detector and method for measuring a change in wafer thickness in chemical-mechanical polishing of semiconductor wafers | Trung T. Doan | 1998-07-07 |
| 5776836 | Self aligned method to define features smaller than the resolution limit of a photolithography system | — | 1998-07-07 |
| 5773363 | Semiconductor processing method of making electrical contact to a node | Garo Derderian | 1998-06-30 |
| 5762537 | System for real-time control of semiconductor wafer polishing including heater | Trung T. Doan | 1998-06-09 |
| 5753543 | Method of forming a thin film transistor | Shubneesh Batra, Pierre C. Fazan | 1998-05-19 |
| 5754390 | Integrated capacitor bottom electrode for use with conformal dielectric | J. Brett Rolfson | 1998-05-19 |
| 5751896 | Method and apparatus to compensate for non-uniform film growth during chemical vapor deposition | — | 1998-05-12 |
| RE35785 | Low-pressure chemical vapor deposition process for depositing high-density highly-conformal, titanium nitride films of low bulk resistivity | Todd W. Buley | 1998-05-05 |
| 5747116 | Method of forming an electrical contact to a silicon substrate | Sujit Sharan | 1998-05-05 |
| 5741546 | Method of depositing titanium nitride films on semiconductor wafers | — | 1998-04-21 |
| 5738562 | Apparatus and method for planar end-point detection during chemical-mechanical polishing | Trung T. Doan, Malcolm Grief | 1998-04-14 |
| 5735960 | Apparatus and method to increase gas residence time in a reactor | Ravi Iyer, Sujit Sharan | 1998-04-07 |
| 5733383 | Spacers used to form isolation trenches with improved corners | Pierre C. Fazan, Martin C. Roberts | 1998-03-31 |
| 5730835 | Facet etch for improved step coverage of integrated circuit contacts | Ceredig Roberts, Anand Srinivasan, Sujit Sharan | 1998-03-24 |