Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632127 | Fixed abrasive planarization pad conditioner incorporating chemical vapor deposited polycrystalline diamond and method for making same | Jerry W. Zimmer, Albert Stubbmann | 2003-10-14 |
| 6149508 | Chemical mechanical planarization system | James F. Vanell | 2000-11-21 |
| 5945346 | Chemical mechanical planarization system and method therefor | James F. Vanell | 1999-08-31 |
| RE35785 | Low-pressure chemical vapor deposition process for depositing high-density highly-conformal, titanium nitride films of low bulk resistivity | Gurtej S. Sandhu | 1998-05-05 |
| 5658391 | Method of chamber cleaning in MOCVD application | Gurtej S. Sandhu | 1997-08-19 |
| 5464031 | Method of chamber cleaning in MOCVD applications | Gurtej S. Sandhu | 1995-11-07 |
| 5246881 | Low-pressure chemical vapor deposition process for depositing high-density, highly-conformal, titanium nitride films of low bulk resistivity | Gurtej S. Sandhu | 1993-09-21 |