Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6796885 | Pad conditioner coupling and end effector for a chemical mechanical planarization system and method therfor | — | 2004-09-28 |
| 6592434 | Wafer carrier and method of material removal from a semiconductor wafer | James Grootegoed, Laura John | 2003-07-15 |
| 6592708 | Filter apparatus and method therefor | — | 2003-07-15 |
| 6572462 | Carrier assembly for chemical mechanical planarization systems and method | — | 2003-06-03 |
| 6514126 | Pad conditioner coupling and end effector for a chemical mechanical planarization system and method therefor | — | 2003-02-04 |
| 6482073 | Translation mechanism for a chemical mechanical planarization system and method therefor | — | 2002-11-19 |
| 6423638 | Filter apparatus and method therefor | — | 2002-07-23 |
| 6406555 | Point of use dilution tool and method | James Grootegoed | 2002-06-18 |
| 6267641 | Method of manufacturing a semiconductor component and chemical-mechanical polishing system therefor | Chad B. Bray | 2001-07-31 |
| 6263605 | Pad conditioner coupling and end effector for a chemical mechanical planarization system and method therefor | — | 2001-07-24 |
| 6149508 | Chemical mechanical planarization system | Todd W. Buley | 2000-11-21 |
| 6135855 | Translation mechanism for a chemical mechanical planarization system and method therefor | — | 2000-10-24 |
| 6107203 | Chemical mechanical polishing system and method therefor | — | 2000-08-22 |
| 6070600 | Point of use dilution tool and method | James Grootegoed | 2000-06-06 |
| 5945346 | Chemical mechanical planarization system and method therefor | Todd W. Buley | 1999-08-31 |
| 5908508 | Gas diffuser plate assembly and RF electrode | Al Garcia | 1999-06-01 |
| 5750440 | Apparatus and method for dynamically mixing slurry for chemical mechanical polishing | Steven D. Ward, James Mullins | 1998-05-12 |
| 5743788 | Platen coating structure for chemical mechanical polishing and method | — | 1998-04-28 |
| 5647911 | Gas diffuser plate assembly and RF electrode | Al Garcia | 1997-07-15 |