Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632699 | Process for making a color selective Si detector array | Michel Marso, Michael Kruger, Michael Berger, Hans Luth | 2003-10-14 |
| 6413408 | Method for the production of a porous layer | Michael Berger, Michael Kruger, Rüdiger Arens-Fischer, Hans Luth, Walter Lang +2 more | 2002-07-02 |
| 6398943 | Process for producing a porous layer by an electrochemical etching process | Rüdiger Arens-Fischer, Michael Berger, Michael Kruger, Hans Luth | 2002-06-04 |
| 6255709 | Color-selective SI detector array | Michel Marso, Michael Kruger, Michael Berger, Hans Luth | 2001-07-03 |
| 6130748 | Chemical sensor based on porous silicon | Michael Kruger, Michael Berger, Rüdiger Arens-Fischer, Hans Luth | 2000-10-10 |
| 5935410 | Process and device for the lighting-supported structuring of porous silicon | Michael Kruger, Hans Luth, Michael Berger, Wolfgang Theiss, Gilles Lerondel +1 more | 1999-08-10 |
| 5696629 | Optical component comprising layers of porous silicon | Michael Berger, Herbert Munder, Stephan Frohnhoff, Hans Luth | 1997-12-09 |