Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689633 | Optical detector with a filter layer made of porous silicon and method for the production thereof | Michel Marso, Dirk Hunkel | 2004-02-10 |
| 6413408 | Method for the production of a porous layer | Michael Berger, Michael Kruger, Markus Thonissen, Hans Luth, Walter Lang +2 more | 2002-07-02 |
| 6398943 | Process for producing a porous layer by an electrochemical etching process | Michael Berger, Michael Kruger, Markus Thonissen, Hans Luth | 2002-06-04 |
| 6130748 | Chemical sensor based on porous silicon | Michael Kruger, Michael Berger, Markus Thonissen, Hans Luth | 2000-10-10 |
| 5874047 | Chemical sensors, in particular silicon-based biosensors | Michael Schoning, Marion Thust, Stephan Frohnhoff, Michael Berger, Peter Kordos +1 more | 1999-02-23 |